Designing Interlock Logic Using Vacuum Gauge Threshold Signals
Define Process Critical Pressure Thresholds Effective interlock logic begins with a clear understanding of the vacuum pressures that directly impact process safety, quality, and equipment protection. In most analytical and production vacuum systems, three critical thresholds emerge from the pump-down curve and recipe requirements: Roughing threshold (atmosphere to 10⁻³ Torr): Protects turbomolecular pumps from operation […]
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