Combining Pirani and Cold Cathode Gauges for Full Range Measurement
Introduction Most industrial vacuum processes span six decades of pressure—from atmosphere during venting and roughing to high vacuum during deposition, etching, or analysis. A single gauge cannot deliver accurate, continuous readings across this entire range. Thermal-conductivity gauges lose sensitivity below 10−3 Torr; ionization gauges cannot operate reliably near atmosphere. The practical solution is to combine […]
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