How Temperature Drift Impacts Pirani Gauge Accuracy in Semiconductor Tools
In semiconductor manufacturing tools—such as etch, deposition, and lithography systems—precise vacuum control directly affects wafer yield and process repeatability. The VG-SP205 Pirani Vacuum Transmitter is widely chosen for the rough-to-medium vacuum regime (atmosphere to 10⁻³ Torr) because of its fast response, compact size, and low cost. Yet even the best Pirani gauges experience temperature drift […]
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