Vacuum Measurement Strategy for Multi-Chamber Systems
In multi-chamber vacuum systems—whether load-locked PVD coaters, multi-stage mass spectrometers, or vacuum heat-treatment furnaces—pressure varies dramatically from atmosphere in the load lock to high vacuum in the process chamber. A single-gauge approach quickly fails: Pirani sensors lose accuracy below 10⁻³ Torr, while cold-cathode gauges cannot start or survive exposure to atmosphere. Poseidon Scientific’s complementary pair—the […]
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