How to Prevent Cold Cathode Gauge Instability During PVD Arc Events
In physical vapor deposition (PVD) processes—whether cathodic arc, magnetron sputtering, or electron-beam evaporation—uncontrolled arc events remain one of the most disruptive challenges for vacuum measurement. A single micro-arc on the target can release a dense plasma plume, generate electromagnetic interference (EMI), and send metallic droplets or ions throughout the chamber. For cold-cathode ionization gauges that […]
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