Vacuum Gauge Placement Strategy in Multi-Chamber Coating Systems
In multi-chamber coating systems—whether inline PVD for architectural glass, cluster tools for semiconductor wafers, or batch coaters for optical components—vacuum levels differ sharply across load-locks, transfer chambers, process stations, and pumping lines. A single misplaced gauge can create blind spots during pump-down, trigger false interlocks, or allow undetected contamination to reach the substrate. The VG-SP205 […]
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