Understanding Ionization Gauge Discharge Characteristics at Ultra-Low Pressure In high-vacuum applications such as scanning electron microscopes, electron-beam lithography systems, and precision analytical instruments, reliable pressure measurement below 10−5 mbar (approximately 7.5 × 10−6 Torr) is essential for maintaining mean free paths long enough to prevent ion scattering and ensure beam stability. Cold-cathode ionization gauges, exemplified

How to Prevent Cold Cathode Gauge Arcing in Contaminated Vacuum Systems Contaminated vacuum environments—common in vacuum heat-treatment furnaces, older diffusion-pumped systems, or processes with residual hydrocarbons—pose a hidden risk to cold-cathode ionization gauges. Uncontrolled arcing can damage electrodes, trigger protective shutdowns, or produce erratic pressure readings that compromise process control. The VG-SM225 Cold Cathode Vacuum